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J-GLOBAL ID:200902136379301402   Reference number:99A0497705

Preparation of Bi4Ti3O12 Thin Films by MOCVD Method and Electrical Properties of Metal/Ferroelectric/Insulator/Semicondutor Structure.

MOCVD法によるBi4Ti3O12薄膜の調製と,金属/強誘電体/絶縁体/半導体構造の電気特性
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Volume: 38  Issue: 4B  Page: 2281-2284  Publication year: Apr. 30, 1999 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Oxide thin films  ,  Metal-insulator-semiconductor structures 
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