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J-GLOBAL ID：200902136755672239   Reference number：00A0517857

表面技術が関わる薄膜の応力 気相膜の特性と応力

Author (1)：
ICHIMURA HIROSHI

About ICHIMURA HIROSHI

(住友金属鉱山 中研)

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Material：
表面技術  (Journal of the Surface Finishing Society of Japan)

About 表面技術


Volume： 51  Issue： 4  Page： 384-389  Publication year： Apr. 01, 2000 
JST Material Number： G0441B  ISSN： 0915-1869  CODEN： HYGIEX  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*thin film

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films in general 
(BK14010X)

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,  Mechanical properties of solids in general 
(BL01021C)

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Reference (34)：
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Terms in the title (3)：
Terms in the title
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薄膜

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, 
応力

About 応力

, 
気相

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