Development of Active Squeeze Air Bearing Using Oscillation of Piezoelectric Actuators. (2nd Report). Radial Squeeze Air Bearing for Motion Error Correction.

ISOBE HIROMI; ONODERA CHIE; NAKAO YOSHIHISA; KYUSOJIN AKIRA

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J-GLOBAL ID：200902142939284908 Reference number：01A0209137

Development of Active Squeeze Air Bearing Using Oscillation of Piezoelectric Actuators. (2nd Report). Radial Squeeze Air Bearing for Motion Error Correction.

圧電素子の高周波振動を利用したアクティブスクイーズ空気軸受の開発 (第2報) ラジアルスクイーズ空気軸受による回転軸の運動誤差補正

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Volume： 67 Issue： 1 Page： 101-105 Publication year： Jan. 05, 2001
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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