Art
J-GLOBAL ID：200902144593676734
Reference number：01A0088191
Characteristics of (Ba,Sr)TiO3 Capacitors with Textured Ru Bottom Electrode.
組織のあるRu下部電極をもつ(Ba,Sr)TiO3コンデンサの特性
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Author (3)：
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Material：
Volume：
39
Issue：
11
Page：
6348-6357
Publication year：
Nov. 15, 2000
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Ferroelectrics,antiferroelectrics and ferroelasticity
, Metallic thin films
, LCR parts
Reference (15)：
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1) T. Aoyama, S. Saida, Y. Okayama, M. Fujisaki, K. Imai and T. Arikado: J. Electrochem. Soc. 143 (1996) 977.
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2) H. Yamaguchi ηl.: ''96 IEEE IEDM Tech. Dig. (IEEE, Piscataway, 1996) p. 675.
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3) T. Aoyama, S. Yamazaki and K. Imai: J. Electrochem. Soc. 145 (1998) 2961.
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4) A. Yuuki, M. Yamamuka, T. Makita, T. Horikawa, T. Shibano, N. Hirano, H. Maeda, N. Mikami, K. Ono, H. Ogata and H. Abe: ''95 IEEE IEDM Tech. Dig. (IEEE, Piscataway, 1995) p. 115.
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5) P.-Y. Lesaicherre, S. Yamamichi, K. Takemura, H. Yamaguchi, K. Tokashiki, Y. Miyasaka, M. Yoshida and H. Ono: Integrat. Ferroelectr. 11 (1995) p. 81.
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Terms in the title (5)：
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