SR-stimulated etching and OMVPE growth for semiconductor nanostructure fabrication.

NONOGAKI Y; HATATE H; OGA R; YAMAMOTO S; FUJIWARA Y; TAKEDA Y; NODA H; URISU T

Art

J-GLOBAL ID：200902147363997158 Reference number：00A0579748

SR-stimulated etching and OMVPE growth for semiconductor nanostructure fabrication.

半導体ナノ構造体製造のためのSR誘起エッチングとOMVPE成長

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Material：
Volume： B74 Issue： 1/3 Page： 7-11 Publication year： May. 01, 2000
JST Material Number： T0553A ISSN： 0921-5107 Document type： Article
Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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