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J-GLOBAL ID:200902150268141506   Reference number:02A0947015

超高精度微細加工への挑戦 制御と計測 位置決め制御技術の現状と動向

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Material:
Volume: 41  Issue: 11  Page: 769-774  Publication year: Nov. 10, 2002 
JST Material Number: F0131A  ISSN: 0453-4662  CODEN: KESEA  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Thesaurus term/Semi thesaurus term
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On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

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Measuring methods and instruments of length,area,cross section,volume,angle  ,  Cutting in general 
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