Art
J-GLOBAL ID：200902150540702741   Reference number：99A0237865

Roller nanoimprint lithography.

ローラによるナノインプリントリソグラフィー
Author (3)：
TAN H

About TAN H

(Princeton Univ., New Jersey)

About Princeton Univ., New Jersey

, 
GILBERTSON A

About GILBERTSON A

(Univ. Minnesota, Minnesota)

About Univ. Minnesota, Minnesota

, 
CHOU S Y

About CHOU S Y

(Princeton Univ., New Jersey)

About Princeton Univ., New Jersey


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 16  Issue： 6  Page： 3926-3928  Publication year： Nov. 1998 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*photoresist

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,...
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JST classification (1)：
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Manufacturing technology of solid-state devices 
(NC03030V)

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ローラ

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, 
ナノインプリントリソグラフィー

About ナノインプリントリソグラフィー


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