Art
J-GLOBAL ID：200902150756829460   Reference number：95A0571413

H∞ Control for Positioning of XY Stage.

H∞制御によるXYステージの位置決め制御
Author (3)：
SATO MIKIO

About SATO MIKIO

(キャノン)

About キャノン

, 
WAKUI SHINJI

About WAKUI SHINJI

(キャノン)

About キャノン

, 
HARA SHINJI

About HARA SHINJI

(東京工大)

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Material：
システム/制御/情報  (システム制御情報学会誌)

About システム/制御/情報


Volume： 39  Issue： 6  Page： 254-257  Publication year： Jun. 1995 
JST Material Number： G0902A  ISSN： 0916-1600  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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position control

About position control

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ループ整形

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JST classification (2)：
JST classification
Category name(code) classified by JST.
System design and analysis 
(IA02030D)

About System design and analysis

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Reference (4)：
Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
H∞制御

About H∞制御

, 
XYステージ

About XYステージ

, 
位置決め制御

About 位置決め制御


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