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J-GLOBAL ID:200902151762970953   Reference number:95A0757797

Development of Precision Feed Mechanism by Applying Principle of Walking Drive. (2nd Report). Development of Feed Velocity Control Method and Ultraprecision Positioning System.

Walking Driveによる精密送り機構の開発 (第2報) 速度制御法と超精密位置決めシステムの開発
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Material:
Volume: 61  Issue:Page: 1106-1110  Publication year: Aug. 1995 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Motion mechanism 
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