Art
J-GLOBAL ID：200902152368486163   Reference number：02A0894115

Ion-Beam-Induced Dual-Tone Imaging of Polyimide via Two-Step Imidization.

2段階イミド化を経由したポリイミドのイオンビーム誘起デュアルトーンイメージング
Author (5)：
SUZUKI Y

About SUZUKI Y

(Tokyo Univ. Agriculture and Technol., Tokyo, JPN)

About Tokyo Univ. Agriculture and Technol., Tokyo, JPN

, 
MAEKAWA Y

About MAEKAWA Y

(Japan Atomic Energy Res. Inst., Gunma, JPN)

About Japan Atomic Energy Res. Inst., Gunma, JPN

, 
YOSHIDA M

About YOSHIDA M

(Japan Atomic Energy Res. Inst., Gunma, JPN)

About Japan Atomic Energy Res. Inst., Gunma, JPN

, 
MAEYAMA K

About MAEYAMA K

(Tokyo Univ. Agriculture and Technol., Tokyo, JPN)

About Tokyo Univ. Agriculture and Technol., Tokyo, JPN

, 
YONEZAWA N

About YONEZAWA N

(Tokyo Univ. Agriculture and Technol., Tokyo, JPN)

About Tokyo Univ. Agriculture and Technol., Tokyo, JPN


Material：
Chemistry of Materials  (Chem Mater)

About Chemistry of Materials


Volume： 14  Issue： 10  Page： 4186-4191  Publication year： Oct. 2002 
JST Material Number： T0893A  ISSN： 0897-4756  CODEN： CMATEX  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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imidization

About imidization

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
crosslinking

About crosslinking

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Other polymeric materials 
(YH07150C)

About Other polymeric materials

,  Applications of electron beams and ion beams 
(BD02070X)

About Applications of electron beams and ion beams

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
段階

About 段階

, 
イミド化

About イミド化

, 
ポリイミド

About ポリイミド

, 
イオンビーム

About イオンビーム

, 
誘起

About 誘起


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