Art
J-GLOBAL ID：200902153334142771
Reference number：02A0625620
Fabrication of Single-Crystal Silicon Field Emitter Array on Glass Substrate.
ガラス基板上への単結晶シリコンフィールドエミッタアレイの作製
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Author (2)：
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Material：
Volume：
41
Issue：
6B
Page：
4307-4310
Publication year：
Jun. 30, 2002
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
短報
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
JST classification (2)：
JST classification
Category name(code) classified by JST.
Other solid-state devices
, Thermoionic emission and field emission
Reference (15)：
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1) C. A. Spindt: J. Appl. Phys. 39 (1968) 3504.
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2) K. Betsui: Tech. Dig. 4th Int. Vacuum Microelectronics Conf. (1991) p. 26.
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3) H. F. Gray and J. L. Show: Tech. Dig. Int. Electron Devices Meet. (IEEE, 1991) p. 26.
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4) M. Nakamoto, T. Ono, Y. Nakamura and K. Ichimura: Tech. Dig. 7th Int. Vacuum Microelectronics Conf. (1994) p. 42.
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5) T. Asano and J. Yasuda: Jpn. J. Appl. Phys. 35 (1996) 6632.
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Terms in the title (4)：
Terms in the title
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