Deposition of ZnO Thin Films on LiNbO<sub>3</sub> Substrates Using Sputtering Technique.

YAMAMOTO HIDEKI; SAIGA NORIAKI; NISHIMORI KATSUMI

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J-GLOBAL ID：200902154558078331 Reference number：99A0512456

Deposition of ZnO Thin Films on LiNbO₃ Substrates Using Sputtering Technique.

LiNbO₃基板上へのZnOスパッタ薄膜の形成

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Volume： 42 Issue： 3 Page： 163-166 Publication year： Mar. 20, 1999
JST Material Number： G0194A ISSN： 0559-8516 CODEN： SHINA Document type： Article
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Oxide thin films

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松原浩司. 応用物理学会講演集(平成10年春)
YAMAMOTO, H. Jap. J. Appl. Phys. 1996, 35, 4833

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Deposition of ZnO Thin Films on LiNbO3 Substrates Using Sputtering Technique.

Deposition of ZnO Thin Films on LiNbO₃ Substrates Using Sputtering Technique.