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J-GLOBAL ID:200902156856529365   Reference number:96A0902362

Real-Time Ellipsometric Measurement during Growth of (AlxGa1-x)0.52In0.48P Thin Films.

(AlXGa1-X)0.52In0.48P薄膜成長時の実時間偏光解析測定
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Volume: 35  Issue: 9A  Page: 4595-4598  Publication year: Sep. 1996 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Polarimetry and polarimeters  ,  Semiconductor thin films 
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