Art
J-GLOBAL ID:200902156856529365
Reference number:96A0902362
Real-Time Ellipsometric Measurement during Growth of (AlxGa1-x)0.52In0.48P Thin Films.
(AlXGa1-X)0.52In0.48P薄膜成長時の実時間偏光解析測定
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Author (4):
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Material:
Volume:
35
Issue:
9A
Page:
4595-4598
Publication year:
Sep. 1996
JST Material Number:
G0520B
ISSN:
0021-4922
Document type:
Article
Article type:
原著論文
Country of issue:
Japan (JPN)
Language:
ENGLISH (EN)
Thesaurus term:
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JST classification (2):
JST classification
Category name(code) classified by JST.
Polarimetry and polarimeters
, Semiconductor thin films
Reference (15):
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HOTTIER, F. Appl.Phys.Lett. 1981, 38, 863
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COLLINS, R. W. Anal.Chem. 1990, 62, 887
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YAKOVLEV, Y. J.Appl.Phys. 1993, 74, 2535
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KAWABATA, S. Oyo Buturi. 1988, 57, 1868
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URBAN, F. K. Appl.Opt. 1993, 32, 2339
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