About INOUE S
About Himeji Inst. Technol., Himeji, JPN
About WADA Y
About Himeji Inst. Technol., Himeji, JPN
About KOTERAZAWA K
About Himeji Inst. Technol., Himeji, JPN
About Vacuum
About sputtered deposition
About Thin films of other inorganic compounds
About デュアル
About ソース
About DCマグネトロンスパッタリング
About TiC
About 蒸着