Art
J-GLOBAL ID：200902168331703265
Reference number：99A0772497
Production of Inductively-Coupled Large-Diameter Plasmas with Internal Antenna.
内部アンテナを用いた誘導結合大直径プラズマの生成
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Author (4)：
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Material：
Volume：
38
Issue：
7B
Page：
4263-4267
Publication year：
Jul. 30, 1999
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
Thesaurus term：
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Plasma production and heating
, Plasma devices
Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
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