Effect of Activation of Oxygen by Electron Cyclotron Resonance Plasma on the Incorporation of Pb in the Deposition of Pb(Zr,Ti)O<sub>3</sub> Films by DC Magnetron Reactive Sputtering.

KIM S-T; LEE M-Y; KIM H-H; KIM Y-I; LEE W-J

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J-GLOBAL ID：200902169114946105 Reference number：97A0950370

Effect of Activation of Oxygen by Electron Cyclotron Resonance Plasma on the Incorporation of Pb in the Deposition of Pb(Zr,Ti)O₃ Films by DC Magnetron Reactive Sputtering.

DCマグネトロン反応性スパッタによるPb(Zr,Ti)O₃膜の堆積時において,電子サイクロトロン共鳴プラズマによる酸素の活性化がPbの挿入に及ぼす効果

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Material：
Volume： 36 Issue： 9A Page： 5663-5669 Publication year： Sep. 1997
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Effect of Activation of Oxygen by Electron Cyclotron Resonance Plasma on the Incorporation of Pb in the Deposition of Pb(Zr,Ti)O3 Films by DC Magnetron Reactive Sputtering.

Effect of Activation of Oxygen by Electron Cyclotron Resonance Plasma on the Incorporation of Pb in the Deposition of Pb(Zr,Ti)O₃ Films by DC Magnetron Reactive Sputtering.