Investigation of Pt/Ti Bottom Electrodes for Pb(Zr,Ti)O<sub>3</sub> Films.

KIM S-T; KIM H-H; LEE M-Y; LEE W-J

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J-GLOBAL ID：200902162673678159 Reference number：97A0245110

Investigation of Pt/Ti Bottom Electrodes for Pb(Zr,Ti)O₃ Films.

Pb(Zr,Ti)O₃膜用のPt/Tiボトム電極

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Material：
Volume： 36 Issue： 1A Page： 294-300 Publication year： Jan. 1997
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Metal-insulator-metal structures , Oxide thin films

Reference (10)：

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2) S. A. Myers and Leo N. Chanpin: Mater. Res. Soc. Symp. Proc. 200 (1990), 231.
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4) J. O. Olowolafe, R. E. Jones, Jr., A. C. Campbell, R. I. Hegde, C. J. Mogab and R. B. Gregory: J. Appl. Phys. 73 (1993) 1764
5) E. A. Kneer, D. P. Birnie III, G. Teowee and J. C. Podlesny: Ferroelectrics 152 (1994) 67.

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Investigation of Pt/Ti Bottom Electrodes for Pb(Zr,Ti)O3 Films.

Investigation of Pt/Ti Bottom Electrodes for Pb(Zr,Ti)O₃ Films.