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J-GLOBAL ID:200902162673678159   Reference number:97A0245110

Investigation of Pt/Ti Bottom Electrodes for Pb(Zr,Ti)O3 Films.

Pb(Zr,Ti)O3膜用のPt/Tiボトム電極
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Material:
Volume: 36  Issue: 1A  Page: 294-300  Publication year: Jan. 1997 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Metal-insulator-metal structures  ,  Oxide thin films 
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