Art
J-GLOBAL ID：200902172341177429
Reference number：93A0653718
Properties of Co-N, Co-Fe-N, and Co-Zr-N films prepared by rf sputtering in nitrogen-argon gas mixtures.
窒素アルゴン混合ガス中でのrfスパッタによって作成したCo-N,Co-Fe-NとCo-Zr-N膜の性質
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Author (2)：
,
Material：
Volume：
73
Issue：
12
Page：
8377-8380
Publication year：
Jun. 15, 1993
JST Material Number：
C0266A
ISSN：
0021-8979
CODEN：
JAPIAU
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Magnetic properties of metals
, Metallic thin films
Terms in the title (8)：
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