Art
J-GLOBAL ID：200902173143921097   Reference number：98A0254920

Plasma Source Ion Implantation into a Three-Dimensional Substrate.

プラズマソースイオン注入による3次元立体物へのイオン注入
Author (2)：
BABA KOMEI

About BABA KOMEI

(長崎県工技セ)

About 長崎県工技セ

, 
HATADA RURIKO

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(長崎県工技セ)

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Material：
表面技術  (Journal of the Surface Finishing Society of Japan)

About 表面技術


Volume： 49  Issue： 2  Page： 176-179  Publication year： Feb. 1998 
JST Material Number： G0441B  ISSN： 0915-1869  CODEN： HYGIEX  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*ion implantation

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,...
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Thesaurus term/Semi thesaurus term
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プラズマソースイオン注入

About プラズマソースイオン注入


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Irradiational changes of metals 
(BK16122N)

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Reference (10)：
ｍore...
Terms in the title (4)：
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プラズマソース

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, 
イオン注入

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, 
3次元

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, 
立体物

About 立体物


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