Atomic Force Microscope Observation of the Change in Shape and Subsequent Disappearance of “Crystal-Originated Particles” after Hydrogen-Atmosphere Thermal Annealing.

YANASE Y; NISHIHATA H; OCHIAI T; TSUYA H

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J-GLOBAL ID：200902173873230766 Reference number：98A0293206

Atomic Force Microscope Observation of the Change in Shape and Subsequent Disappearance of “Crystal-Originated Particles” after Hydrogen-Atmosphere Thermal Annealing.

水素雰囲気中で焼鈍後の「結晶由来粒子」の形状の変化とそれに続く消滅の原子間力顕微鏡による観察

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Material：
Volume： 37 Issue： 1 Page： 1-4 Publication year： Jan. 1998
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Surface structure of semiconductors

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