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J-GLOBAL ID:200902179746493136   Reference number:99A1038430

Spin-on Cu films for ultralarge scale integrated metallization.

超大規模集積メタライゼーション用のスピンオンCu膜
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Volume: 17  Issue:Page: 2321-2324  Publication year: Sep. 1999 
JST Material Number: E0974A  ISSN: 1071-1023  CODEN: JVTBD9  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices  ,  Metallic thin films 
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