Deposition of ZnO Thin Films on z-cut LiNbO<sub>3</sub> Substrates Using Sputtering Technique.

YAMAMOTO HIDEKI; SAIGA NORIAKI; NISHIMORI KATSUMI

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J-GLOBAL ID：200902180323359555 Reference number：00A0491862

Deposition of ZnO Thin Films on z-cut LiNbO₃ Substrates Using Sputtering Technique.

zカットLiNbO₃基板上へのZnOスパッタ薄膜の形成

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Material：
Volume： 43 Issue： 3 Page： 193-196 Publication year： Mar. 20, 2000
JST Material Number： G0194A ISSN： 0559-8516 CODEN： SHINA Document type： Article
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Oxide thin films

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WU, M. S. J.Appl.Phys. 1987, 62, 2482
YAMAYA, K. Appl.Phys.Lett. 1998, 72, 235
SAIGA, N. J.Appl.Phys. 1987, 61, 1230
AITA, C. R. J.Appl.Phys. 1980, 51, 5533
小林浩志. 静岡大学電子工学研究所研究報告. 1985, 19, 47

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Deposition of ZnO Thin Films on z-cut LiNbO3 Substrates Using Sputtering Technique.

Deposition of ZnO Thin Films on z-cut LiNbO₃ Substrates Using Sputtering Technique.