Art
J-GLOBAL ID：200902182129565627
Reference number：96A0361789
Dust formation and charging in an Ar/SiH4 radio-frequency discharge.
Ar/SiH4 rf放電におけるダスト形成と帯電
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Author (4)：
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Material：
Volume：
14
Issue：
2
Page：
556-561
Publication year：
Mar. 1996
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Gas discharges
Terms in the title (5)：
Terms in the title
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