AlN epitaxial growth on off-angle R-plane sapphire substrates by MOCVD.

SHIBATA T; ASAI K; NAKAMURA Y; TANAKA M; KAIGAWA K; SHIBATA J; SAKAI H

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J-GLOBAL ID：200902183590120072 Reference number：01A0701746

AlN epitaxial growth on off-angle R-plane sapphire substrates by MOCVD.

オフ角R面サファイア基板上でのMOCVDによるAlNエピタクシー成長

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Material：
Volume： 229 Page： 63-68 Publication year： Jul. 2001
JST Material Number： B0942A ISSN： 0022-0248 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Semiconductor thin films

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