Photoreflectance characterization of the plasma-induced damage in Si substrate.

WADA H; AGATA M; ERIGUCHI K; FUJIMOTO A; KANASHIMA T; OKUYAMA M

Art

J-GLOBAL ID：200902185478702886 Reference number：00A0921702

Photoreflectance characterization of the plasma-induced damage in Si substrate.

Si基板のプラズマ誘起損傷のフォトリフレクタンスによる評価

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Author (6)： , , , , ,
Material：
Volume： 88 Issue： 5 Page： 2336-2341 Publication year： Sep. 01, 2000
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Irradiational changes semiconductors , Other optical effects

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