Art
J-GLOBAL ID：200902186390032712
Reference number：93A0912327
Aluminum nitride thin film sensor for force, acceleration, and acoustic emission sensing.
力,加速度およびアコースティックエミッションを感知する窒化アルミニウム薄膜センサ
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Author (4)：
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Material：
Volume：
11
Issue：
5
Page：
2437-2446
Publication year：
Sep. 1993
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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Thesaurus term/Semi thesaurus term
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Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
JST classification (2)：
JST classification
Category name(code) classified by JST.
Cutting in general
, Piezoelectricity,pyroelectricity,electret
Terms in the title (6)：
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