Art
J-GLOBAL ID：200902189085350550
Reference number：00A0195949
Alternating ion bombardment technique for wall surface control in depositive plasma processing.
堆積性のプラズマプロセシングにおける壁面制御のための交互イオン照射法
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Author (4)：
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Material：
Volume：
18
Issue：
1
Page：
137-142
Publication year：
Jan. 2000
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Applications of plasma
, Manufacturing technology of solid-state devices
Terms in the title (4)：
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