Art
J-GLOBAL ID：200902191648003317   Reference number：98A0598983

Ion-beam and plasma processing techniques for thin-film synthesis of superhard materials in boron-carbon-nitrogen system.

イオン・プラズマプロセスによるほう素,炭素,窒素系超硬質薄膜の合成
Author (2)：
SETSUHARA YUICHI

About SETSUHARA YUICHI

(大阪大 接合科研)

About 大阪大 接合科研

, 
MIYAKE SHOJI

About MIYAKE SHOJI

(大阪大 接合科研)

About 大阪大 接合科研


Material：
応用物理  (JSAP International)

About 応用物理


Volume： 67  Issue： 6  Page： 659-663  Publication year： Jun. 1998 
JST Material Number： F0252A  ISSN： 0369-8009  CODEN： OYBSA  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*nitride

About nitride

,...
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Thesaurus term/Semi thesaurus term
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CBN(ceramic)

About CBN(ceramic)

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Ceramic coating to nonmetallic materials 
(YC02040K)

About Ceramic coating to nonmetallic materials

Reference (52)：
ｍore...
Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
イオン

About イオン

, 
プラズマプロセス

About プラズマプロセス

, 
ほう素

About ほう素

, 
炭素

About 炭素

, 
窒素

About 窒素

, 
硬質薄膜

About 硬質薄膜


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