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J-GLOBAL ID:200902193121443133   Reference number:01A0628652

Improved Three-Step De-Embedding Method to Accurately Account for the Influence of Pad Parasitics in Silicon On-Wafer RF Test-Structures.

シリコンオンウエハ試験構造におけるパッド寄生効果の影響を正確に説明する,改良型三段階掘出し法
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Volume: 48  Issue:Page: 737-742  Publication year: Apr. 2001 
JST Material Number: C0222A  ISSN: 0018-9383  CODEN: IETDAI  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Measurement,testing and reliability of solid-state devices 
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