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J-GLOBAL ID:200902195492287447   Reference number:99A0506919

GaN on Si Substrate with AlGaN/AlN Intermediate Layer.

AlGaN/AlN中間層を有するSi基板上のGaN薄膜
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Volume: 38  Issue: 5A  Page: L492-L494  Publication year: May. 01, 1999 
JST Material Number: F0599B  ISSN: 0021-4922  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Semiconductor thin films 
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