Experimental Study of Effective Carrier Mobility of Multi-Fin-Type Double-Gate Metal-Oxide-Semiconductor Field-Effect Transistors with (111) Channel Surface Fabricated by Orientation-Dependent Wet Etching

LIU Yongxun; SUGIMATA Etsuro; ISHII Kenichi; MASAHARA Meishoku; ENDO Kazuhiko; MATSUKAWA Takashi; YAMAUCHI Hiromi; O'UCHI Shinichi; SUZUKI Eiichi

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J-GLOBAL ID：200902206143481009 Reference number：06A0421108

Experimental Study of Effective Carrier Mobility of Multi-Fin-Type Double-Gate Metal-Oxide-Semiconductor Field-Effect Transistors with (111) Channel Surface Fabricated by Orientation-Dependent Wet Etching

結晶方位に依存する湿式エッチングによって作製した(111)チャネル表面を持つ多重フィン型二重ゲート金属-酸化物-半導体電界効果トランジスタの有効キャリア移動度の実験的研究

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Volume： 45 Issue： 4B Page： 3084-3087 Publication year： Apr. 30, 2006
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Metal-insulator-semiconductor structures , Transistors

Reference (35)：

International Technology Roadmap for Semiconductors: Process Integration, Devices and Structures and Emerging Research Devices, 2001, p. 30.
T. Sekigawa and Y. Hayashi: Solid-State Electron.27(1984)827.
D. Hisamoto, W. C. Lee, J. Kedzierski, E. Anderson, H. Takeuchi, K. Asano, T. J. King, J. Bokor and C. Hu: IEDM Tech. Dig., 1998, p. 1032.
X. Huang, W. C. Lee, C. Kuo, D. Hisamoto, L. Chang, J. Kedzierski, E. Anderson, H. Takeuchi, Y. K. Choi, K. Asano, V. Subramanian, T. J. King, J. Bokor and C. Hu: IEDM Tech. Dig., 1999, P. 67.
Y. K. Choi, N. Lindert, P. Xuan, S. Tang, D. Ha, E. Anderson, T. J. King. J. Bokor and C. Hu: IEDM Tech. Dig., 2001, p. 421.

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