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J-GLOBAL ID:200902206849225285   Reference number:06A0015786

Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement

AFMにおける圧電アクチュエータが横寸法測定に与える非線形及びヒステリシスの影響
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Volume: 125  Issue:Page: 590-596  Publication year: Jan. 10, 2006 
JST Material Number: B0345C  ISSN: 0924-4247  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Piezoelectric devices 
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