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J-GLOBAL ID：200902206849225285   Reference number：06A0015786

Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement

AFMにおける圧電アクチュエータが横寸法測定に与える非線形及びヒステリシスの影響

Author (7)： HUANG Qiangxian (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol., Tsukuba, JPN) ,  HUANG Qiangxian (School of Instrumentation, Hefei Univ. of Technol., Hefei, Anhui 230009, CHN) ,  GONDA Satoshi (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol., Tsukuba, JPN) ,  MISUMI Ichiko (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol., Tsukuba, JPN) ,  SATO Osamu (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol., Tsukuba, JPN) ,  KEEM Taeho (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol., Tsukuba, JPN) ,  KUROSAWA Tomizo (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol., Tsukuba, JPN)
Material： Sensors and Actuators. A. Physical  (Sens Actuators A)
Volume： 125  Issue： 2  Page： 590-596  Publication year： Jan. 10, 2006 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： atomic force microscope ,...

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JST classification (1)： Piezoelectric devices  (NC03110I)

Terms in the title (5)： AFM ,  圧電アクチュエータ ,  寸法測定 ,  非線形 ,  ヒステリシス