About OKA Toshitaka
About Advanced Res. Inst. for Sci. and Engineering, Waseda Univ., 3-4-1 Okubo, Shinjuku, Tokyo 169-8555, JPN
About HAMA Yoshimasa
About Advanced Res. Inst. for Sci. and Engineering, Waseda Univ., 3-4-1 Okubo, Shinjuku, Tokyo 169-8555, JPN
About ITO Kenji
About National Inst. of Advanced Industrial Sci. and Technol., 1-1-1 Higashi, Tsukuba-shi, Ibaraki 305-8565, JPN
About KOBAYASHI Yoshinori
About National Inst. of Advanced Industrial Sci. and Technol., 1-1-1 Higashi, Tsukuba-shi, Ibaraki 305-8565, JPN
About Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms
About sputtering
About Radiation polymer chemistry
About スパッタ
About 酸化けい素
About コーティング
About 重合体
About 酸化的分解