Art
J-GLOBAL ID：200902210462497128   Reference number：08A0094979

Argon-hydrogen plasma cleaning effect on electroless Ni plating for under bump metallurgy of solder bump

はんだバンプのバンプ下地金属のためのアルゴン-水素プラズマ清浄効果の無電解ニッケルめっきに対する影響
Author (6)：
IKEDA A.

About IKEDA A.

(Kyushu Univ., Fukuoka, JPN)

About Kyushu Univ., Fukuoka, JPN

, 
KAJIWARA K.

About KAJIWARA K.

(Kyushu Univ., Fukuoka, JPN)

About Kyushu Univ., Fukuoka, JPN

, 
SAKAMOTO A.

About SAKAMOTO A.

(Kyushu Univ., Fukuoka, JPN)

About Kyushu Univ., Fukuoka, JPN

, 
HATTORI R.

About HATTORI R.

(Kyushu Univ., Fukuoka, JPN)

About Kyushu Univ., Fukuoka, JPN

, 
KURIYAKI H.

About KURIYAKI H.

(Kyushu Univ., Fukuoka, JPN)

About Kyushu Univ., Fukuoka, JPN

, 
KUROKI Y.

About KUROKI Y.

(Kyushu Univ., Fukuoka, JPN)

About Kyushu Univ., Fukuoka, JPN


Material：
Proceedings of International Symposium on Dry Process  (Proc Int Symp Dry Process)

About Proceedings of International Symposium on Dry Process


Volume： 2007  Page： 65-66  Publication year： 2007 
JST Material Number： Y0378B  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
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*cleaning (washing)

About cleaning (washing)

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*プラズマ清浄

About プラズマ清浄

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Applications of plasma 
(BJ02110K)

About Applications of plasma

,  Electroless plating 
(WC08024S)

About Electroless plating

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
はんだバンプ

About はんだバンプ

, 
バンプ下地金属

About バンプ下地金属

, 
アルゴン

About アルゴン

, 
水素プラズマ

About 水素プラズマ

, 
清浄効果

About 清浄効果

, 
無電解ニッケルめっき

About 無電解ニッケルめっき


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