Art

J-GLOBAL ID：200902213915050633   Reference number：09A0159494

Analysis of precursors for crystal growth of YBaCuO thin films in magnetron sputtering deposition

マグネトロンスパッタリング蒸着におけるYBaCuO薄膜結晶成長のための前駆体の解析

Author (8)： FUKAYA Kota (Dep. of Electrical Engineering and Computer Sci., Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN) ,  SASAKI Koichi (Plasma Nanotechnology Res. Center, Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN) ,  GAO Junsi (Dep. of Electrical Engineering and Computer Sci., Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN) ,  KIMURA Taishi (Dep. of Quantum Engineering, Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN) ,  WATANABE Mitsuhiro (Dep. of Quantum Engineering, Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN) ,  INOUE Masumi (Dep. of Quantum Engineering, Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN) ,  FUJIMAKI Akira (Dep. of Quantum Engineering, Nagoya Univ., Furo-cho, Chikusa-ku, Nagoya 464-8603, JPN) ,  SUGAI Hideo (Dep. of Electronics and Information Engineering, Chubu Univ., Matsumoto-cho, Kasugai 487-8501, JPN)
Material： Thin Solid Films
Volume： 517  Issue： 8  Page： 2762-2766  Publication year： Feb. 27, 2009 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： yttrium barium copper oxide ,  superconducting thin film ,  magnesium oxide ,  *magnetron sputtering ,  radical ,  density ,  *precursor (substance) ,  fluorescence spectroscopy ,  *YBCO thin film ,  mixed gas ,  Argon ,  Oxygen
Semi thesaurus term： copper ,  mixed gas ,  Ar

JST classification (2)： Properties of oxide superconductors  (BM04023I) ,  Techniques and equipment of thin film deposition  (BK14020I)

Terms in the title (5)： マグネトロンスパッタリング ,  蒸着 ,  薄膜結晶成長 ,  前駆体 ,  解析