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J-GLOBAL ID:200902220257312714   Reference number:04A0299956

Fourier transform infrared phase-modulated ellipsometry for in situ diagnostics of plasma-surface interactions

プラズマと半導体表面との相互作用に関するその場診断を目的としたFourier変換型赤外位相変調偏光解析法
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Volume: 37  Issue:Page: R49-R73  Publication year: Mar. 21, 2004 
JST Material Number: B0092B  ISSN: 0022-3727  CODEN: JPAPBE  Document type: Article
Article type: 文献レビュー  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Thesaurus term/Semi thesaurus term
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Polarimetry and polarimeters  ,  Solid-plasma interactions  ,  Applications of plasma 

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