Art

J-GLOBAL ID：200902220723829609   Reference number：09A0236050

Fabrication of High Aspect Ratio X-ray Grating Using X-ray Lithography

X線リソグラフィーによる高アスペクト比X線回折格子の製作

Author (6)： NODA Daiji (Lab. of Advanced Sci. and Technol. for Ind., Univ. of Hyogo) ,  TSUJII Hiroshi (Lab. of Advanced Sci. and Technol. for Ind., Univ. of Hyogo) ,  SHIMADA Kazuma (Lab. of Advanced Sci. and Technol. for Ind., Univ. of Hyogo) ,  YASHIRO Wataru (Dep. of Advanced Materials Sci., School of Frontier Sci., The Univ. of Tokyo) ,  MOMOSE Atsushi (Dep. of Advanced Materials Sci., School of Frontier Sci., The Univ. of Tokyo) ,  HATTORI Tadashi (Lab. of Advanced Sci. and Technol. for Ind., Univ. of Hyogo)
Material： Journal of Solid Mechanics and Materials Engineering (Web)  (J Solid Mech Mater Eng (Web))
Volume： 3  Issue： 2  Page： 416-423 (J-STAGE)  Publication year： 2009 
JST Material Number： U0026A  ISSN： 1880-9871  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： X-ray image ,  optical diffraction ,  X-ray interferometer ,  *diffraction grating ,  *aspect ratio ,  mouse(animal) ,  soft tissue ,  biomedical tissue ,  X ray lithography ,  *X-ray diffraction
Semi thesaurus term： Talbot effect

JST classification (1)： X-ray diffraction methods  (BK01020I)

Reference (11)：

• 1. A. Momose, S. Kawamoto, I. Koyama, Y. Hamaishi, K. Takai and Y. Suzuki, "Demonstration of X-ray Talbot interferometry", Japanese Journal of Applied Physics, Vol. 42, No. 7B, 2003, pp. L866-L868.
• 2. A. Momose, "Recent advances in X-ray phase imaging", Japanese Journal of Applied Physics, Vol. 44, No. 9A, 2005, pp. 6355-6367.
• 3. A. Momose, W. Yashiro, Y. Takeda, Y. Suzuki and T. Hattori, "Phase tomography by X-ray Talbot interferometry for biological imaging", Japanese Journal of Applied Physics, Vol. 45, No. 6A, 2006, pp. 5254-5262.
• 4. C. David, B. Nöhammer, H. H. Solak and E. Ziegler, "Differential X-ray phase contrast imaging using a shearing interferometer", Applied Physics Letters, Vol. 81, 2002, pp. 3287-3289.
• 5. F. Pfeiffer, T. Weitkamp, O. Bunk and C. David, "Phase retrieval and differential phase-contrast imaging with low- brilliance X-ray sources", Nature Physics, Vol. 2, 2006, pp. 258-261.

Terms in the title (4)： X線リソグラフィー ,  高アスペクト比 ,  X線回折格子 ,  製作