Art

J-GLOBAL ID：200902221113891155   Reference number：05A0564428

Electrostatic micromotor and its reliability

静電マイクロモータとその信頼性

Author (3)： ZHANG Wenming (State Key Lab. of Vibration, Shock and Noise, Shanghai Jiao Tong Univ., Shanghai, CHN) ,  MENG Guang (State Key Lab. of Vibration, Shock and Noise, Shanghai Jiao Tong Univ., Shanghai, CHN) ,  LI Hongguang (State Key Lab. of Vibration, Shock and Noise, Shanghai Jiao Tong Univ., Shanghai, CHN)
Material： Microelectronics Reliability  (Microelectronics and Reliability)
Volume： 45  Issue： 7-8  Page： 1230-1242  Publication year： Jul. 2005 
JST Material Number： C0530A  ISSN： 0026-2714  Document type： Article
Article type： 文献レビュー  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *micromotor ,...

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JST classification (3)： Motors  (NB07030U) ,  Measurement,testing and reliability of solid-state devices  (NC03040G) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (1)： マイクロモータ