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J-GLOBAL ID：200902222112451301
Reference number：04A0909283
Structure and electrical properties of MgTiO3 thin films deposited by rf magnetron sputtering
高周波マグネトロンスパッタリングによって堆積したMgTiO3薄膜の構造及び電気特性
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Author (2)：
,
Material：
Volume：
22
Issue：
6
Page：
2440-2445
Publication year：
Nov. 2004
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxide thin films
, Metal-insulator-semiconductor structures
Terms in the title (4)：
Terms in the title
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,
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