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J-GLOBAL ID:200902223098267191   Reference number:03A0333147

Basic research on microfabrication applied to metal particles. 1st report:Effect of second phase in steels on microscratching.

金属粒子適用マイクロファブリケーションの基礎的研究 第1報:鋼の微小引っかきに及ぼす第2相合金の影響
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Volume: 47  Issue:Page: 263-268  Publication year: May. 01, 2003 
JST Material Number: L0473A  ISSN: 0914-2703  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Grinding  ,  Manufacturing technology of solid-state devices 
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