Deep Ultraviolet Raman Microspectroscopic Characterization of Polishing-Induced Surface Damage in SiC Crystals

NAKASHIMA S.; KATO T.; NISHIZAWA S.; MITANI T.; OKUMURA H.; YAMAMOTO T.

Art

J-GLOBAL ID：200902226215962326 Reference number：06A0292881

Deep Ultraviolet Raman Microspectroscopic Characterization of Polishing-Induced Surface Damage in SiC Crystals

SiC結晶の研磨誘起表面損傷の深紫外Raman顕微分光法によるキャラクタリゼーション

Publisher site Copy service {{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=06A0292881&COPY=1") }}
Access JDreamⅢ for advanced search and analysis. {{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=06A0292881&from=J-GLOBAL&jstjournalNo=C0285A") }}

Author (6)： , , , , ,
Material：
Volume： 153 Issue： 4 Page： G319-G323 Publication year： 2006
JST Material Number： C0285A ISSN： 1945-7111 CODEN： JESOAN Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

,...
,...

To see more with JDream III (charged). {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=06A0292881&from=J-GLOBAL&jstjournalNo=C0285A") }}

Materials of solid-state devices , Salts

, , , , , , ,

Return to Previous Page