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J-GLOBAL ID：200902228591860928   Reference number：06A0256537

Parameter dispersion characterization for arrays of HfC-coated emitters on poly-Si substrate

ポリ-Si基板上のHfC被覆エミッタアレイのパラメータ分散評価
Author (6)：
NICOLAESCU D.

About NICOLAESCU D.

(National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JPN)

About National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JPN

, 
NAGAO M.

About NAGAO M.

(National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JPN)

About National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JPN

, 
FILIP V.

About FILIP V.

(Fac. of Physics, Univ. of Bucharest, P.O. Box MG-11, Bucharest-Magurele 76900, ROM)

About Fac. of Physics, Univ. of Bucharest, P.O. Box MG-11, Bucharest-Magurele 76900, ROM

, 
TANOUE H.

About TANOUE H.

(National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JPN)

About National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JPN

, 
KANEMARU S.

About KANEMARU S.

(National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JPN)

About National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JPN

, 
ITOH J.

About ITOH J.

(National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JPN)

About National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JPN


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 24  Issue： 2  Page： 1045-1051  Publication year： Mar. 2006 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*field emission array

About field emission array

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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flat-panel display

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JST classification (3)：
JST classification
Category name(code) classified by JST.
Electron and ion sources 
(BD02020U)

About Electron and ion sources

,  Thermoionic emission and field emission 
(BM09020S)

About Thermoionic emission and field emission

,  Display equipment 
(NC06030Q)

About Display equipment

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
Si基板

About Si基板

, 
HFC

About HFC

, 
エミッタ

About エミッタ

, 
アレイ

About アレイ

, 
パラメータ

About パラメータ

, 
評価

About 評価


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