Fabrication of Spiral Micro-Coil Utilizing LIGA Process

SHIMADA Osamu; KUSUMI Shinji; MEKARU Harutaka; SATO Noriaki; SHIMIZU Masami; YAMASHITA Michiru; HATTORI Tadashi

Art

J-GLOBAL ID：200902232452042630 Reference number：06A0065765

Fabrication of Spiral Micro-Coil Utilizing LIGA Process

LIGAプロセスを用いた巻き線型マイクロコイルの製造

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Material：
Volume： 49 Issue： 1 Page： 74-78 Publication year： Jan. 15, 2006
JST Material Number： G0026B ISSN： 1344-7912 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

Reference (5)：

BECKER, E. W. Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding. Microelectron. Eng. 1986, 4, Issue 1, 35-42
NAGAOKA, H. Inductance of Circular Solenoidal Current Sheet. J. College of Science, Tokyo. 1909, 27, Art. 6, 18-33
MEKARU, H. Beamline BL11 for LIGA Process at the NewSUBARU. Nucl. Instrum. and Methods A. 2001, 467-468, Part 1, 741-744
ANDO, A. Isochronous Storage Ring of the NewSUBARU Project. J. Synchrotron Rad. 1998, 5, Part 3, 342-344
MEKARU, H. Fabrication of Mold Master for Spiral Micro-Coil Utilizing X-Ray Lithography of Synchrotron Radiation. Jpn. J. Appl. Phys., B. 2004, 436, 4036-4040

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