Art

J-GLOBAL ID：200902232452042630   Reference number：06A0065765

Fabrication of Spiral Micro-Coil Utilizing LIGA Process

LIGAプロセスを用いた巻き線型マイクロコイルの製造

Author (7)： SHIMADA Osamu (SUSUMU Co., LTD., Kyoto, JPN) ,  KUSUMI Shinji (SUSUMU Co., LTD., Kyoto, JPN) ,  MEKARU Harutaka (Univ. Hyogo, Hyogo, JPN) ,  SATO Noriaki (Juken Kogyo Co., Ltd., Aichi, JPN) ,  SHIMIZU Masami (Juken Kogyo Co., Ltd., Aichi, JPN) ,  YAMASHITA Michiru (Hyogo Prefectural Inst. of Technol., Kobe, JPN) ,  HATTORI Tadashi (Univ. Hyogo, Hyogo, JPN)
Material： JSME International Journal. Series A. Solid Mechanics and Material Engineering (Japan Society of Mechanical Engineers)  (JSME International Journal. Series A. Mechanics and Material Engineering)
Volume： 49  Issue： 1  Page： 74-78  Publication year： Jan. 15, 2006 
JST Material Number： G0026B  ISSN： 1344-7912  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *fine patterning ,...
Semi thesaurus term： LIGAプロセス

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JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Reference (5)：

• BECKER, E. W. Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding. Microelectron. Eng. 1986, 4, Issue 1, 35-42
• NAGAOKA, H. Inductance of Circular Solenoidal Current Sheet. J. College of Science, Tokyo. 1909, 27, Art. 6, 18-33
• MEKARU, H. Beamline BL11 for LIGA Process at the NewSUBARU. Nucl. Instrum. and Methods A. 2001, 467-468, Part 1, 741-744
• ANDO, A. Isochronous Storage Ring of the NewSUBARU Project. J. Synchrotron Rad. 1998, 5, Part 3, 342-344
• MEKARU, H. Fabrication of Mold Master for Spiral Micro-Coil Utilizing X-Ray Lithography of Synchrotron Radiation. Jpn. J. Appl. Phys., B. 2004, 436, 4036-4040

Terms in the title (3)： LIGAプロセス ,  巻き線 ,  マイクロコイル