Art
J-GLOBAL ID：200902282175551864
Reference number：04A0543854
Fabrication of Mold Master for Spiral Microcoil Utilizing X-Ray Lithography of Synchrotron Radiation
シンクロトロン放射のX線リソグラフィーを用いた螺旋マイクロコイル用原型の作製
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Author (6)：
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Material：
Volume：
43
Issue：
6B
Page：
4036-4040
Publication year：
Jun. 30, 2004
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Reference (6)：
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BECKER, E. W. Microelectron. Eng. 1986, 4, 35
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TABATA, O. Proc. IEEE 15th Int. Annual Conf. on Micro Electro Mechanical Systems 2002, Las Vegas. 2002, 180
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LEE, K. Proc. IEEE 16th Int. Annual Conf. on Micro Electro Mechanical Systems 2003, Kyoto. 2003, 558
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MEKARU, H. Nucl. Instrum. & Methods A. 2001, 467-468, 741
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ANDO, A. J. Synchrotron Rad. 1998, 5, 342
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