Art
J-GLOBAL ID：200902237147470373   Reference number：06A0504083

Structural relaxation in sputter-deposited silica glass

スパッタリングにより蒸着されたシリカガラスにおける構造緩和
Author (3)：
HIROSE Tomohiro

About HIROSE Tomohiro

(Toyota Technological Inst., Res. Center for Advanced Photon Technol., Frontier Material Lab., 2-12-1, Hisakata ...)

About Toyota Technological Inst., Res. Center for Advanced Photon Technol., Frontier Material Lab., 2-12-1, Hisakata ...

, 
SAITO Kazuya

About SAITO Kazuya

(Toyota Technological Inst., Res. Center for Advanced Photon Technol., Frontier Material Lab., 2-12-1, Hisakata ...)

About Toyota Technological Inst., Res. Center for Advanced Photon Technol., Frontier Material Lab., 2-12-1, Hisakata ...

, 
IKUSHIMA Akira J.

About IKUSHIMA Akira J.

(Toyota Technological Inst., Res. Center for Advanced Photon Technol., Frontier Material Lab., 2-12-1, Hisakata ...)

About Toyota Technological Inst., Res. Center for Advanced Photon Technol., Frontier Material Lab., 2-12-1, Hisakata ...


Material：
Journal of Non-Crystalline Solids  (J Non-Cryst Solid)

About Journal of Non-Crystalline Solids


Volume： 352  Issue： 21-22  Page： 2198-2203  Publication year： Jul. 01, 2006 
JST Material Number： D0642A  ISSN： 0022-3093  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*silica glass

About silica glass

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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annealing

About annealing

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Structure of other amorphous materials 
(BK04040Z)

About Structure of other amorphous materials

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
スパッタリング

About スパッタリング

, 
蒸着

About 蒸着

, 
シリカガラス

About シリカガラス

, 
構造緩和

About 構造緩和


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