Hard nanocomposite Ti-Cu-N films prepared by d.c. reactive magnetron co-sputtering

LI Z G; MIYAKE S; KUMAGAI M; SAITO H; MURAMATSU Y

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J-GLOBAL ID：200902238669880667 Reference number：04A0395254

Hard nanocomposite Ti-Cu-N films prepared by d.c. reactive magnetron co-sputtering

dc反応性マグネトロンコスパッタリングにより作製した硬質ナノ複合材料Ti-Cu-N薄膜

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Material：
Volume： 183 Issue： 1 Page： 62-68 Publication year： May. 01, 2004
JST Material Number： D0205C ISSN： 0257-8972 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Vapor plating

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