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J-GLOBAL ID:200902238961510170   Reference number:06A0015942

Deposition of mechanically hard amorphous carbon nitride films from decomposition of BrCN. Effects of substrate cooling and pulsed rf-bias voltage

BrCNの分解による機械的に硬いアモルファス窒化炭素薄膜の析出
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Volume: 352  Issue:Page: 1-7  Publication year: Jan. 01, 2006 
JST Material Number: D0642A  ISSN: 0022-3093  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds 
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