Deep ultraviolet Raman scattering characterization of ion-implanted SiC crystals

NAKASHIMA S.; MITANI T.; SENZAKI J.; OKUMURA H.; YAMAMOTO T.

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J-GLOBAL ID：200902239586379474 Reference number：05A0715910

Deep ultraviolet Raman scattering characterization of ion-implanted SiC crystals

イオン注入SiC結晶の深紫外Raman散乱評価

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Material：
Volume： 97 Issue： 12 Page： 123507.1-123507.8 Publication year： Jun. 15, 2005
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Irradiational changes semiconductors , Infrared spectra,Raman scattering and Raman spectra of semiconductors

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