Art
J-GLOBAL ID:200902247108168100   Reference number:08A0107278

Construction of New CVD Evaporation Supply Method by Flashing Spray

2成分混合溶液を用いたCVD新気化供給法の構築
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Volume: 2007  Issue: Vol.7  Page: 171-172  Publication year: Sep. 07, 2007 
JST Material Number: X0587B  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices  ,  Jets 
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