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J-GLOBAL ID:200902250202522198   Reference number:05A1021592

Improvement of Thickness Uniformity of Quartz Wafer by Numerically Controlled Plasma CVM-Correction of Thickness Variation of Quartz Wafer by Numerically Controlled Machining Utilizing Rotary Electrode-

数値制御プラズマCVMによる水晶ウエハの高精度加工に関する研究-円筒型回転電極を用いた数値制御加工による水晶ウエハ厚さの均一化-
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Volume: 71  Issue:Page: 655-659  Publication year: May. 05, 2005 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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